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CF 6.0″ 6-port multiport chamber 3D model
Chambers

CF 6.0″ 6-port multiport chamber

6 × CF 6.0″ ConFlat flanges, 2,223.8 cm³ of internal volume and 581.5 cm² of wetted surface.

Build a system with this part

Its internal volume and surface area feed the pumpdown simulation, and its 3D characterization sets how it affects pumping speed.

Specifications

Type6-port multiport chamber
Flanges6 × CF 6.0″ ConFlat (CF), knife-edge, copper gasket
Ports6
Internal gas volume2,223.8 cm³ (2.224 L)
Wetted surface area581.5 cm²
MaterialStainless 304
Overall size152 × 152 × 152 mm
Outgassing (unbaked, 1 h)6.0e-9 Torr·L/s/cm²
Simulation-readyYes, characterized from its 3D geometry

Volume and surface area are computed from the CAD model's enclosed gas space. Material outgassing values are typical published figures.

Parts that mate with CF 6.0″ flanges

CF 6.0″ 6-port box chamber CF 6.0″ 6-port box chamberCF 6.0″ · 2,243 cm³CF 6.0″ feedthrough CF 6.0″ feedthroughCF 6.0″CF 6.0″ blank flange CF 6.0″ blank flangeCF 6.0″CF 6.0″ to CF 4.5″ reducer CF 6.0″ to CF 4.5″ reducerCF 6.0″ / CF 4.5″ · 556 cm³CF 6.0″ to CF 2.75″ zero-length reducer CF 6.0″ to CF 2.75″ zero-length reducerCF 6.0″ / CF 2.75″ · 33 cm³CF 10.0″ to CF 6.0″ reducer CF 10.0″ to CF 6.0″ reducerCF 10.0″ / CF 6.0″ · 991 cm³CF 13.25″ to CF 6.0″ zero-length reducer CF 13.25″ to CF 6.0″ zero-length reducerCF 13.25″ / CF 6.0″ · 300 cm³CF 10.0″ to CF 6.0″ zero-length reducer CF 10.0″ to CF 6.0″ zero-length reducerCF 10.0″ / CF 6.0″ · 236 cm³